| Identification | Back Directory | [Name]
LITHIUM TANTALUM ETHOXIDE | [CAS]
127503-04-2 | [Synonyms]
LITHIUM TANTALUM ETHOXIDE
Lithium tantalum ethoxide, 99.9% (metals basis), 5% w/v in e
Lithium tantalum ethoxide, 99.9% (metals basis), 5% w/v in ethanol
Lithium tantalum ethoxide, 5% w/v in ethanol, 99.9% (metals basis) | [Molecular Formula]
C12H30LiO6Ta | [MDL Number]
MFCD00210630 | [MOL File]
127503-04-2.mol | [Molecular Weight]
458.25 |
| Chemical Properties | Back Directory | [Boiling point ]
230°C/0.2mm | [Fp ]
230°C/0.2mm | [form ]
Liquid | [color ]
Pale yellow | [Water Solubility ]
Decomposes in water. | [Sensitive ]
Moisture Sensitive | [Exposure limits]
ACGIH: STEL 1000 ppm
OSHA: TWA 1000 ppm(1900 mg/m3)
NIOSH: IDLH 3300 ppm; TWA 1000 ppm(1900 mg/m3) |
| Hazard Information | Back Directory | [Uses]
Lithium tantalum ethoxide is a precursor is used to deposit ultra thin films of Tantalum oxide and other tantalum containing films by atomic layer deposition and chemical vapor deposition methods. |
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