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TANTALUM SILICIDE

CAS No.
12067-56-0
Chemical Name:
TANTALUM SILICIDE
Synonyms
silicon,tantalum;Einecs 235-081-3;TANTALUM SILICIDE;pentatantalum trisilicide;Nickel Chromium (Ni-Cr) Alloy Sputtering Targets;Tantalumsilicide,99.5%(metalsbasisexcludingNb),Nb0.1-1%;TANTALUM SILICIDE, 99.5% (METALS BASIS EXCLUDING NB), NB 0.1
CBNumber:
CB4174798
Molecular Formula:
Si3Ta5
Molecular Weight:
988.99
MDL Number:
MFCD00678396
MOL File:
12067-56-0.mol
Last updated:2024-12-18 14:08:52

TANTALUM SILICIDE Properties

Melting point 2499 ℃
Density 13,060 (ρ/kg.m–3)
Crystal Structure Hexagonal
Stability The compound is thermally stable in air up to 400°C
EPA Substance Registry System Tantalum silicide (Ta5Si3) (12067-56-0)

SAFETY

Risk and Safety Statements

TSCA  Yes

TANTALUM SILICIDE Chemical Properties,Uses,Production

Chemical Properties

-325 mesh powder(s); used as a 99.5 or 99.95% material as a sputtering target in the fabrication of integrated circuits [ALF93] [CER91]

TANTALUM SILICIDE Preparation Products And Raw materials

Raw materials

Preparation Products

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TANTALUM SILICIDE pentatantalum trisilicide TANTALUM SILICIDE, 99.5% (METALS BASIS EXCLUDING NB), NB 0.1 Tantalumsilicide,99.5%(metalsbasisexcludingNb),Nb0.1-1% Einecs 235-081-3 silicon,tantalum Nickel Chromium (Ni-Cr) Alloy Sputtering Targets 12067-56-0