Bis(diethylamino)silane
- CAS No.
- 27804-64-4
- Chemical Name:
- Bis(diethylamino)silane
- Synonyms
- BDEAS;SilanediaMide;amino)dihydrosiL;BIS(DIETHYLAMINO)SILANE;BDEAS: SiH2[N(CH2CH3)2]2;Bis(diethylamino)silane BDEAS;bis(diethylamino)dihydrosilane;Bis(diethylamino) Silane Liquid;N,N,N',N'-Tetraethylsilanediamine;Bis(diethylaMino)silane, 97% BDEAS
- CBNumber:
- CB32653773
- Molecular Formula:
- C8H22N2Si
- Molecular Weight:
- 174.36
- MOL File:
- 27804-64-4.mol
- MSDS File:
- SDS
- Modify Date:
- 2024/4/29 13:09:37
SAFETY
Risk and Safety Statements
| Symbol(GHS) |    GHS07,GHS02,GHS05 |
|---|---|
| Signal word | Danger |
| Hazard statements | H314-H260-H302+H312+H332-H225-H335 |
| Precautionary statements | P223-P231+P232-P280-P335+P334-P370+P378-P402+P404-P501-P210-P233-P240-P241-P242-P243-P280-P303+P361+P353-P370+P378-P403+P235-P501-P260-P264-P280-P301+P330+P331-P303+P361+P353-P363-P304+P340-P310-P321-P305+P351+P338-P405-P501 |
Bis(diethylamino)silane Chemical Properties,Uses,Production
Uses
Bis(diethylamino) silane (BDEAS) is a highly volatile precursor with a vapor pressure of 30 Torr at 70°C and is liquid at room temperature with a melting point of less than ?10°C and a boiling point of 188°C. It is studied and evaluated as a liquid-phase silicon precursor in the low-temperature atomic layer deposition (ALD) of hafnium silicate films. BDEAS and TDEAH are suitable precursors for the ALD of SiO2, HfO2, or HfSiOx films when used in conjunction with ozone. The composition of various HfSiOx films evaluated from RBS spectra demonstrates excellent tunability of film composition[1].
References
[1] Rajesh Katamreddy, C. Takoudis, B. Feist. “Bis(diethylamino) silane as the silicon precursor in the atomic layer deposition of HfSiOx.” Journal of The Electrochemical Society 155 1 (2008).
Bis(diethylamino)silane Preparation Products And Raw materials
Raw materials
Preparation Products
| Supplier | Tel | Country | ProdList | Advantage | Inquiry |
|---|---|---|---|---|---|
| Shanghai Daken Advanced Materials Co.,Ltd | +86-371-+86-371-66670886 | China | 19797 | 58 | Inquiry |
| Zhengzhou Alfa Chemical Co.,Ltd | +8618530059196 | China | 12185 | 58 | Inquiry |
| Career Henan Chemica Co | +86-0371-86658258 +8613203830695 | China | 30230 | 58 | Inquiry |
| Hefei TNJ Chemical Industry Co.,Ltd. | +86-0551-65418671 +8618949823763 | China | 34563 | 58 | Inquiry |
| Dideu Industries Group Limited | +86-29-89586680 +86-15129568250 | China | 22854 | 58 | Inquiry |
| SUZHOU SENFEIDA CHEMICAL CO.,LTD | +86-0512-83500002 +8618501500038 | China | 26362 | 58 | Inquiry |
| Shaoxin Catsyn Co., Ltd. | +undefined-0575-82040869 +86-0575-82040869; | China | 6114 | 58 | Inquiry |
| Henan Fengda Chemical Co., Ltd | +86-371-86557731 +86-13613820652 | China | 20233 | 58 | Inquiry |
| Shanghai Acmec Biochemical Technology Co., Ltd. | +86-18621343501; +undefined18621343501 | China | 33338 | 58 | Inquiry |
| Xiamen Work-For-World Medicine Co.,Ltd. | +8615921822462 | China | 446 | 58 | Inquiry |