TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE suppliers
TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE
- CAS:
- 169896-41-7
- MF:
- C16H39N4Ta
- MW:
- 468.46
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Properties
- Boiling point:
- 90°C/0.1mm
- Density
- 1.252 g/mL at 25 °C (lit.)
- Flash point:
- 115 °F
- form
- liquid
- Specific Gravity
- 1.252
- color
- colorless to pale yellow
- Water Solubility
- Reacts with water.
- Sensitive
- Air Sensitive
- Hydrolytic Sensitivity
- 8: reacts rapidly with moisture, water, protic solvents
Safety Information
- Symbol(GHS)
GHS02,GHS05
- Signal word
- Danger
- Hazard statements
- H318-H226-H261-H314
- Precautionary statements
- P223-P303+P361+P353-P405-P501a-P231+P232-P280-P305+P351+P338-P310-P422
- Hazard Codes
- C
- Risk Statements
- 10-14/15-34
- Safety Statements
- 26-36/37/39-43-45
- RIDADR
- UN 3398 4.3/PG 2
- WGK Germany
- 3
- TSCA
- No
- HazardClass
- 4.3
- PackingGroup
- II
Use
Tantalum tris(diethylamido)-tert-butylimide is a useful precursor for the atomic layer deposition of tantalum oxide and tantalum nitride.
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