Bis(dimethylamino)dimethylsilane
| 3768-58-9 Basic information More.. |
Product Name: | Bis(dimethylamino)dimethylsilane | Synonyms: | Bis(dimethylamino)dimethylsilane,96%;BIS(DIMETHYLAMINO)DIMETHYLSILANE;BIS(DIMETHYLAMINO)DIMETHYSILANE;BIS(DIMETHYLAMINO)DIMETHYLSILANE 96%;bis-(n,n-diethylamino)-dimethylsilane;Dimethylbis[dimethylamino]silane;hexamethyl-silanediamin;hexamethyl-Silanediamine | CAS: | 3768-58-9 | MF: | C6H18N2Si | MW: | 146.31 | EINECS: | 223-200-1 | Mol File: | 3768-58-9.mol | |
Use
Bis(dimethylamino)dimethylsilane is used in the chemical vapor deposition of silicon nitride films, and also the atomic layer deposition of SiNxCy dielectric sealing layers using plasma-enhanced atomic layer deposition (PE-ALD). It is also used as a reagent for silylation.
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3768-58-9
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