| | 20396-66-1 Basic information More.. |
| Product Name: | DIBORANE-D 6 | | Synonyms: | DIBORANE-D 6;Diborane(6)-d6;Perdeuterodiborane;DIBORANE-D6 10% IN DEUTERIUM ELECTRON&;DIBORANE-D6, 10% IN HELIUM, ELECTRONIC G RADE;Deuterated Diborane;The deuterium generation borane;rideuterioborane | | CAS: | 20396-66-1 | | MF: | B2D6 | | MW: | 33.71 | | EINECS: | | | Mol File: | 20396-66-1.mol |  |
Use
Diborane gas is used primarily as a p-type dopant in the deposition of epitaxial and amorphous silicon thin films. The unique properties of diborane-d6 can result in increased device performance and reliability.
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20396-66-1
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