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TETRAKIS(DIETHYLAMINO)TITANIUM

CAS No.
4419-47-0
Chemical Name:
TETRAKIS(DIETHYLAMINO)TITANIUM
Synonyms
TDEAT;amino)titanium(IV);titanium diethylamide;TITANIUM (IV) DIETHYLAMIDE;Titanium isopropoxide(TDEAT);TETRAKIS(DIETHYLAMINO)TITANIUM;Tetrakis(diethylamion)titanium;TITANIUM TETRAKIS(DIETHYLAMIDE);TETRAKIS (DIETHYLAMIDO) TITANIUM;Titanium(IV) Diethylamide 99.99%
CBNumber:
CB8264181
Molecular Formula:
C16H40N4Ti
Molecular Weight:
336.38
MDL Number:
MFCD00015648
MOL File:
4419-47-0.mol
MSDS File:
SDS
Last updated:2024-12-18 14:08:57

TETRAKIS(DIETHYLAMINO)TITANIUM Properties

Melting point 4 °C
Boiling point 112 °C0.1 mm Hg(lit.)
Density 0.931 g/mL at 25 °C(lit.)
refractive index n20/D 1.536(lit.)
Flash point -18 °F
storage temp. Store at +2°C to +8°C.
solubility Reacts with air.
form liquid
color yellow to orange
Specific Gravity 0.95
Hydrolytic Sensitivity 8: reacts rapidly with moisture, water, protic solvents
Sensitive Moisture Sensitive
BRN 3621431
CAS DataBase Reference 4419-47-0(CAS DataBase Reference)
NIST Chemistry Reference Tetrakis(diethylamino)titanium(4419-47-0)
EPA Substance Registry System Ethanamine, N-ethyl-, titanium(4+) salt (4419-47-0)

SAFETY

Risk and Safety Statements

Symbol(GHS)  GHS hazard pictogramsGHS hazard pictograms
GHS02,GHS05
Signal word  Danger
Hazard statements  H225-H260-H314
Precautionary statements  P210-P223-P231+P232-P280-P370+P378-P422
Hazard Codes  F,C,Xi
Risk Statements  11-14/15-34-36/37/38
Safety Statements  26-36/37/39-43-45-37/39-16
RIDADR  UN 3398 4.3/PG 1
WGK Germany  3
10-21
TSCA  Yes
HS Code  2921 19 50
HazardClass  4.3
PackingGroup  II
NFPA 704
3
2 0

TETRAKIS(DIETHYLAMINO)TITANIUM price More Price(13)

Manufacturer Product number Product description CAS number Packaging Price Updated Buy
Sigma-Aldrich 407399 Tetrakis(diethylamido)titanium(IV) technical grade 4419-47-0 5G $205 2023-06-20 Buy
Sigma-Aldrich 469866 Tetrakis(diethylamido)titanium(IV) 99.999% trace metals basis 4419-47-0 5g $318 2023-01-07 Buy
Sigma-Aldrich 469866 Tetrakis(diethylamido)titanium(IV) 99.999% trace metals basis 4419-47-0 25g $575 2023-01-07 Buy
Sigma-Aldrich 8.14018 Tetrakis(diethylamino)titanium for synthesis 4419-47-0 5ml $306 2022-05-15 Buy
Alfa Aesar 040469 Tetrakis(diethylamino)titanium(IV) 99.99% (metals basis) 4419-47-0 10g $166 2021-12-16 Buy
Product number Packaging Price Buy
407399 5G $205 Buy
469866 5g $318 Buy
469866 25g $575 Buy
8.14018 5ml $306 Buy
040469 10g $166 Buy

TETRAKIS(DIETHYLAMINO)TITANIUM Chemical Properties,Uses,Production

Description

Tetrakis (diethylamino) titanium is useful Ti-source precusor. Tetrakis (diethylamino) titanium is useful in TiN film deposition using the atomic layer deposition method1,2. It is also a useful compound during the process of etching a layer of diamond like carbon.

Reference

  1. Kim, Ju Youn, et al. "Comparison of TiN Films Deposited Using Tetrakisdimethylaminotitanium and Tetrakisdiethylaminotitanium by the Atomic Layer Deposition Method." Japanese Journal of Applied Physics 42.7A (2003):4245-4248.
  2. Katamreddy, Rajesh, et al. "Ti source precursors for atomic layer deposition of TiO2, STO and BST." Ecs Transactions 16.4(2008):660-71.
  3. Shoemaker, Erika Leigh, et al. "Process for reactive ion etching a layer of diamond like carbon." US, US8409458. 2013.

Chemical Properties

Clear dark red liquid

Uses

Precursors Packaged for Depositions Systems

General Description

Atomic number of base material: 22 Titanium

Purification Methods

Dissolve it in *C6H6, filter if a solid separates, evaporate under reduced pressure and distil it. It is an orange liquid which reacts violently with alcohols. [Bradley et al. J Chem Soc 3857 1960, Beilstein 4 IV 313.]

TETRAKIS(DIETHYLAMINO)TITANIUM Preparation Products And Raw materials

Raw materials

Preparation Products

Global( 82)Suppliers
Supplier Tel Email Country ProdList Advantage
City Chemical LLC
2039322489 sales@citychemical.com United States 168 58
Hefei TNJ Chemical Industry Co.,Ltd.
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Dayang Chem (Hangzhou) Co.,Ltd.
571-88938639 +8617705817739 info@dycnchem.com China 52849 58
PT CHEM GROUP LIMITED
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GIHI CHEMICALS CO.,LIMITED
+8618058761490 info@gihichemicals.com China 49978 58
Henan Fengda Chemical Co., Ltd
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Aladdin Scientific
+1-+1(833)-552-7181 sales@aladdinsci.com United States 52924 58

TETRAKIS(DIETHYLAMINO)TITANIUM Spectrum

TDEAT TETRAKIS (DIETHYLAMIDO) TITANIUM TETRAKIS(DIETHYLAMINO)TITANIUM TETRAKIS DIETHYL AMINO TITANIUM (IV) TITANIUM (IV) DIETHYLAMIDE TITANIUM TETRAKIS(DIETHYLAMIDE) Titanium, tetrakis(diethylamino)- TETRAKIS(DIETHYLAMINO)TITANIUM, 99.999% TETRAKIS(DIETHYLAMINO)TITANIUM, TECH. Tetrakis(diethylamino)titanium,99.99%(metalsbasis) Tetrakis(diethylamino)titanium,99% Ethanamine, N-ethyl-, titanium(4+) salt tetrakis(diethylamido)titanium(iv) titanium diethylamide Tetrakis(diethylamino)titanium(IV), Titanium(IV) tetrakis(diethylamide) Tetrakis(diethylamion)titanium Titanium(IV) tetrakis(diethylamide) Tetrakis(diethylamino)titanium, 99%, 22-1050, contained in 50 ml Swagelok cylinder for CVD/ALD Tetrakis(diethylamino)titanium(IV), 99%, 22-1050, contained in 50 ml Swagelok cylinder for CVD/ALD Titanium(IV) Diethylamide 99.99% Tetrakis(diethylaMino)titaniuM(IV), 99.99% (Metals basis) TETRAKIS(DIETHYLAMINO)TITANIUM FOR SYNTH TITANIUM TETRAKIS(DIETHYLAMIDE), 99+% Tetrakis(diethylaMino)titaniuM(IV), 99%, 22-1050, contained in 50 Ml Swagelok cylinder (96-1070) for CVD/ALD Tetrakis(diethylamido)titanium(IV) 99.999% trace metals basis Tetrakis(diethylamino)titanium for synthesis Tetrakis(diethylamino)titanium(IV), 99%, 22-1050, contained in 50 ml Swagelok(R) cylinder (96-1070) for CVD/ALD amino)titanium(IV) TETRAKIS(DIETHYLAMINO)TITANIUM ISO 9001:2015 REACH Titanium isopropoxide(TDEAT) 4419-47-0 TiNC2H524 C2H52N4Ti C8H40N4TI C4H11N14Ti C16H40N4Ti Catalysis and Inorganic Chemistry Titanium metal amide complex