TETRAKIS(DIETHYLAMINO)TITANIUM suppliers
TETRAKIS(DIETHYLAMINO)TITANIUM
- CAS:
- 4419-47-0
- MF:
- C16H40N4Ti
- MW:
- 336.38
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Properties
- Melting point:
- 4 °C
- Boiling point:
- 112 °C0.1 mm Hg(lit.)
- Density
- 0.931 g/mL at 25 °C(lit.)
- refractive index
- n
20/D 1.536(lit.)
- Flash point:
- -18 °F
- storage temp.
- Store at +2°C to +8°C.
- solubility
- Reacts with air.
- form
- liquid
- color
- yellow to orange
- Specific Gravity
- 0.95
- Hydrolytic Sensitivity
- 8: reacts rapidly with moisture, water, protic solvents
- Sensitive
- Moisture Sensitive
- BRN
- 3621431
Safety Information
- Symbol(GHS)
GHS02,GHS05
- Signal word
- Danger
- Hazard statements
- H225-H260-H314
- Precautionary statements
- P210-P223-P231+P232-P280-P370+P378-P422
- Hazard Codes
- F,C,Xi
- Risk Statements
- 11-14/15-34-36/37/38
- Safety Statements
- 26-36/37/39-43-45-37/39-16
- RIDADR
- UN 3398 4.3/PG 1
- WGK Germany
- 3
- F
- 10-21
- TSCA
- Yes
- HS Code
- 2921 19 50
- HazardClass
- 4.3
- PackingGroup
- II
Use
Tetrakis (diethylamino) titanium is useful Ti-source precusor. Tetrakis (diethylamino) titanium is useful in TiN film deposition using the atomic layer deposition method1,2. It is also a useful compound during the process of etching a layer of diamond like carbon.
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