헥사플루오로에테인(헥사플루오르에탄)

헥사플루오로에테인(헥사플루오르에탄) 속성

헥사플루오로에테인(헥사플루오르에탄) C화학적 특성, 용도, 생산

화학적 성질

Hexafluoroethane is a colorless and odorless gas, or liquid under pressure. asphyxiant in high concentrations. Gas density is heavier than air. Hexafluoroethane is chemically inert and has a very high global warming potential (GWP = 11,100; Greenhouse gas protocol, Fifth Assessment Report AR5). It is an etchant and chamber cleaning agent.

용도

Hexafluoroethane is used as an important component in some refrigeration mixtures, and as a reactive ion etching gas in semiconductor materials processing applications. It can be used for selective etching of metal silicides and oxides versus their metal substrates and also for etching of silicon dioxide over silicon.
In semiconductor applications, for example in reactive ion etching, hexafluoroethane with a fluorine to carbon ratio of 3:1 offers a unique source of highly reactive trifluoromethyl radicals without accompanying hydrogen atoms.As a result, semiconductor material plasma etching processes employing hexafluoroethane are relatively aggressive with respect to fluorine radical formation.

일반 설명

HEXAFLUOROETHANE is a colorless, odorless gas. HEXAFLUOROETHANE is relatively inert. The mixture is nonflammable and nontoxic, though asphyxiation may occur because of displacement of oxygen. Under prolonged exposure to fire or intense heat the containers may rupture violently and rocket.

반응 프로필

HEXAFLUOROETHANE is chemically inert in many situations, but can react violently with strong reducing agents such as the very active metals and the active metals. Can react with strong oxidizing agents or weaker oxidizing agents under extremes of temperature.

건강위험

Vapors may cause dizziness or asphyxiation without warning. Vapors from liquefied gas are initially heavier than air and spread along ground. Contact with gas or liquefied gas may cause burns, severe injury and/or frostbite. Fire may produce irritating, corrosive and/or toxic gases.

화재위험

Some may burn but none ignite readily. Containers may explode when heated. Ruptured cylinders may rocket.

잠재적 노출

It is used as a coolant, in dielectric fluids; as a propellant and refrigerant.

운송 방법

UN2193 Hexafluoroethane or Refrigerant gas R-116, Hazard Class: 2.2; Labels: 2.2-Nonflammable compressed gas.

Purification Methods

Purify it for pyrolysis studies by passing through a copper vessel containing CoF3 at ca 270o, and hold for 3hours in a bottle with a heated (1300o) platinum wire. It is then fractionally distilled. [Steunenberg & Cady J Am Chem Soc 74 4165 1962, Beilstein 1 IV 132.]

비 호환성

Active metals. Keep away from heat and sunlight.

폐기물 처리

Return refillable compressed gas cylinders to supplier.

헥사플루오로에테인(헥사플루오르에탄) 준비 용품 및 원자재

원자재

준비 용품

헥사플루오로에테인(헥사플루오르에탄) 공급 업체

공급자	전화	이메일	국가	제품 수	이점
Henan Tianfu Chemical Co.,Ltd.	+86-0371-55170693 +86-19937530512	info@tianfuchem.com	China	21639	55
career henan chemical co	+86-0371-86658258 +8613203830695	sales@coreychem.com	China	29886	58
Hubei xin bonus chemical co. LTD	86-13657291602	linda@hubeijusheng.com	CHINA	22963	58
Chongqing Chemdad Co., Ltd	+86-023-6139-8061 +86-86-13650506873	sales@chemdad.com	China	39894	58
SIMAGCHEM CORP	+86-13806087780	sale@simagchem.com	China	17365	58
Allfluoro pharmaceutical co. ltd.	021-26137118 +8615821363818	sales@allfluoro.com	China	5790	58
Hefei TNJ Chemical Industry Co.,Ltd.	+86-0551-65418671 +8618949823763	sales@tnjchem.com	China	34553	58
ANHUI WITOP BIOTECH CO., LTD	+8615255079626	eric@witopchemical.com	China	23541	58
CD Chemical Group Limited	+8615986615575	info@codchem.com	China	20342	58
changzhou huayang technology co., ltd	+8615250961469	2571773637@qq.com	China	9729	58

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