| Identification | More | [Name]
Bis(dimethylamino)dimethylsilane | [CAS]
3768-58-9 | [Synonyms]
BIS(DIMETHYLAMINO)DIMETHYLSILANE
BIS(DIMETHYLAMINO)DIMETHYSILANE
bis-(n,n-diethylamino)-dimethylsilane
Dimethylbis[dimethylamino]silane
hexamethyl-silanediamin
hexamethyl-Silanediamine
BIS(DIMETHYLAMINO)DIMETHYLSILANE 96%
Bis(N,N-dimethylamino)dimethylsilane
Silanediamine,hexamethyl-
Dimethylsilylenebis(dimethylamine)
N,N,N',N',α,α-Hexamethylsilanediamine
N,N,N',N'-Tetramethyldimethylsilanediamine | [EINECS(EC#)]
223-200-1 | [Molecular Formula]
C6H18N2Si | [MDL Number]
MFCD00008296 | [Molecular Weight]
146.31 | [MOL File]
3768-58-9.mol |
| Chemical Properties | Back Directory | [Appearance]
CLEAR COLOURLESS LIQUID | [Melting point ]
−98 °C(lit.) | [Boiling point ]
128-129 °C(lit.) | [density ]
0.809 g/mL at 25 °C(lit.)
| [vapor density ]
>1 (vs air)
| [vapor pressure ]
1 mm Hg ( 20 °C)
| [refractive index ]
n20/D 1.417(lit.)
| [Fp ]
18 °F
| [storage temp. ]
Flammables area | [form ]
liquid | [pka]
10.76±0.70(Predicted) | [color ]
colorless | [Specific Gravity]
0.81 | [Water Solubility ]
Hydrolyzes in water. | [Hydrolytic Sensitivity]
8: reacts rapidly with moisture, water, protic solvents | [Sensitive ]
Moisture Sensitive | [BRN ]
1736095 | [CAS DataBase Reference]
3768-58-9(CAS DataBase Reference) | [EPA Substance Registry System]
3768-58-9(EPA Substance) |
| Safety Data | Back Directory | [Hazard Codes ]
F,C | [Risk Statements ]
R11:Highly Flammable.
R15:Contact with water liberates extremely flammable gases.
R34:Causes burns. | [Safety Statements ]
S16:Keep away from sources of ignition-No smoking .
S26:In case of contact with eyes, rinse immediately with plenty of water and seek medical advice .
S36/37/39:Wear suitable protective clothing, gloves and eye/face protection .
S45:In case of accident or if you feel unwell, seek medical advice immediately (show label where possible) .
S27:Take off immediately all contaminated clothing . | [RIDADR ]
UN 2924 3/PG 2
| [WGK Germany ]
3
| [F ]
10-21 | [TSCA ]
Yes | [HazardClass ]
3 | [PackingGroup ]
II | [HS Code ]
29319090 |
| Questions And Answer | Back Directory | [Uses]
Bis(dimethylamino)dimethylsilane is used in the chemical vapor deposition of silicon nitride films, and also the atomic layer deposition of SiNxCy dielectric sealing layers using plasma-enhanced atomic layer deposition (PE-ALD). It is also used as a reagent for silylation.
|
|
|