ChemicalBook > Product Catalog >Organic Chemistry >Amides >Acyclic polyamines and their derivatives >TRIS(DIMETHYLAMINO)SILANE
TRIS(DIMETHYLAMINO)SILANE
- CAS No.
- 15112-89-7
- Chemical Name:
- TRIS(DIMETHYLAMINO)SILANE
- Synonyms
- TDMAS;3DMAS;DK087;LS 1460;amino)siL;(Me2N)3SiH;3DMAS : [(CH3)2N]3SiH;Tris(dimethyamino)silane;Tri(dimethylamino)silane;TRIS(DIMETHYLAMINO)SILANE
- CBNumber:
- CB1241150
- Molecular Formula:
- C6H19N3Si
- Molecular Weight:
- 161.32
- MOL File:
- 15112-89-7.mol
- MSDS File:
- SDS
- Modify Date:
- 2024/7/15 16:45:23
| Melting point | <0°C |
|---|---|
| Boiling point | 145 °C |
| Density | 0,838 g/cm3 |
| refractive index | 1.4247 |
| Flash point | 25°C |
| pka | 10.93±0.70(Predicted) |
| form | liquid |
| color | colorless to light yellow |
| Specific Gravity | 0.84 |
| Sensitive | air sensitive, moisture sensitive |
| Hydrolytic Sensitivity | 8: reacts rapidly with moisture, water, protic solvents |
| EPA Substance Registry System | N,N,N',N',N'',N''-Hexamethylsilanetriamine (15112-89-7) |
SAFETY
Risk and Safety Statements
| Symbol(GHS) |    GHS02,GHS05,GHS06 |
|---|---|
| Signal word | Danger |
| Hazard statements | H225-H261-H302-H311-H314-H330 |
| Precautionary statements | P210-P231+P232-P280-P303+P361+P353-P304+P340+P310-P305+P351+P338 |
| Hazard Codes | F,C |
| Risk Statements | 10-36/37/38-52/53-34-29-20-15-11 |
| Safety Statements | 16-26-36/37/39-45-43 |
| RIDADR | 1993 |
| WGK Germany | 3 |
| RTECS | VV5800000 |
| TSCA | Yes |
| Toxicity | rabbit,LD50,skin,477mg/kg (477mg/kg),LIVER: OTHER CHANGESLUNGS, THORAX, OR RESPIRATION: CHRONIC PULMONARY EDEMA,Toxicology and Industrial Health. Vol. 5, Pg. 45, 1989. |
TRIS(DIMETHYLAMINO)SILANE price More Price(2)
| Manufacturer | Product number | Product description | CAS number | Packaging | Price | Updated | Buy |
|---|---|---|---|---|---|---|---|
| Sigma-Aldrich(India) | 759562 | Tris(dimethylamino)silane packaged for use in deposition systems | 15112-89-7 | 25G | ₹68803.7 | 2022-06-14 | Buy |
| Sigma-Aldrich(India) | 570133 | Tris(dimethylamino)silane electronic grade, 99.999% | 15112-89-7 | 25G | ₹14797.78 | 2022-06-14 | Buy |
TRIS(DIMETHYLAMINO)SILANE Chemical Properties,Uses,Production
Uses
Tris(dimethylamino)silane (TDMAS) is used as an organosilicon source for the deposition of Si oxynitride; carbonitride; nitride and oxide thin films. It is also used to form multicomponent silicon containing thin films. The depositions can be carried out at low substrate temperatures (<150). The melting point and vapor pressure of TDMAS is in a suitable working range; thus making it a very good vapor deposition precursor.
General Description
Please inquire for quantity, pricing, and packaging options.
TRIS(DIMETHYLAMINO)SILANE Preparation Products And Raw materials
Raw materials
Preparation Products
Global( 89)Suppliers
| Supplier | Tel | Country | ProdList | Advantage | Inquiry |
|---|---|---|---|---|---|
| Shanghai Daken Advanced Materials Co.,Ltd | +86-371-66670886 | China | 16220 | 58 | Inquiry |
| ATK CHEMICAL COMPANY LIMITED | +undefined-21-51877795 | China | 32760 | 60 | Inquiry |
| career henan chemical co | +86-0371-86658258 +8613203830695 | China | 29826 | 58 | Inquiry |
| Fuxin Pharmaceutical | +86-021-021-50872116 +8613122107989 | China | 10297 | 58 | Inquiry |
| Hefei TNJ Chemical Industry Co.,Ltd. | 0551-65418671 | China | 34571 | 58 | Inquiry |
| WinWin Chemical CO., Limited | +86-0577-64498589 +8615325081899 | China | 14198 | 58 | Inquiry |
| Dideu Industries Group Limited | +86-29-89586680 +86-15129568250 | China | 26216 | 58 | Inquiry |
| Dayang Chem (Hangzhou) Co.,Ltd. | 571-88938639 +8617705817739 | China | 52861 | 58 | Inquiry |
| PT CHEM GROUP LIMITED | +86-85511178 +86-85511178 | China | 35451 | 58 | Inquiry |
| ShenZhen Trendseen Biological Technology Co.,Ltd. | 13417589054 | China | 11681 | 58 | Inquiry |
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TRIS(DIMETHYLAMINO)SILANE
n,n,n’,n’,n’’,n’’-hexamethyl-silanetriamin
n,n,n’,n’,n’’,n’’-hexamethylsilanetriamine
N,N,N’,N’,N’’,N’’-hexamethyl-Silanetriamine
TRIS(DIMETHYLAMINO)SILANE 99+%
N,N',N''-(Silanetriyl)tris(dimethylamine)
N,N',N''-Silanetriyltris(dimethylamine)
TRIS(DIMETHYLAMINO)SILANE, 99.9+%
Tris(diMethylaMino)silane, 99+%, 14-8750, contained in 50 Ml Swagelok cylinder (96-1070) for CVD/ALD
(Me2N)3SiH
TDMAS
Tris(dimethylamido)silane
Tris(dimethylamino)silane electronic grade, 99.999%
Tris(dimethylamino)silane packaged for use in deposition systems
Tris(dimethyamino)silane
N,N,N',N',N'',N''-hexamethyl-Silanetriamine tris(Dimethylamino)silane n,n,n',n',n'',n''-hexamethylsilanetriamine n,n,n',n',n'',n''-hexamethyl-silanetriamin Silanetriamine,N,N,N',N',N'',N''-hexamethyl-
Tri(dimethylamino)silane
LS 1460
Tris(dimethylamino)silane, 99+% 3DMAS
3DMAS : [(CH3)2N]3SiH
Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM
Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM, 14-8750, contained in 50 ml Swagelok(R) cylinder (96-1070) for CVD/ALD
Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM, 14-8750, contained in 50 ml Swagelok cylinder (96-1070) for CVD/ALD
3DMAS
Tris(dimethylamino)silane Liquid
amino)siL
Silanetriamine, N,N,N',N',N'',N''-hexamethyl-
Tris(dimethylamino)silane 3DMAS
TRIS(DIMETHYLAMINO)SILANE ISO 9001：2015 REACH
DK087
15112-89-7
CH32N3SiH
C6H19N3Si
ALD Precursors
organosilicon compounds