Bis(dimethylamino)dimethylsilane
Bis(dimethylamino)dimethylsilane
- CAS:
- 3768-58-9
- MF:
- C6H18N2Si
- MW:
- 146.31
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Properties
- Melting point:
- −98 °C(lit.)
- Boiling point:
- 128-129 °C(lit.)
- Density
- 0.809 g/mL at 25 °C(lit.)
- vapor density
- >1 (vs air)
- vapor pressure
- 1 mm Hg ( 20 °C)
- refractive index
- n
20/D 1.417(lit.)
- Flash point:
- 18 °F
- storage temp.
- Flammables area
- form
- liquid
- pka
- 10.76±0.70(Predicted)
- Specific Gravity
- 0.81
- color
- colorless
- Water Solubility
- Hydrolyzes in water.
- Sensitive
- Moisture Sensitive
- Hydrolytic Sensitivity
- 8: reacts rapidly with moisture, water, protic solvents
- BRN
- 1736095
Safety Information
- Symbol(GHS)
GHS02,GHS05
- Signal word
- Danger
- Hazard statements
- H225-H314
- Precautionary statements
- P210-P233-P240-P280-P303+P361+P353-P305+P351+P338
- Hazard Codes
- F,C
- Risk Statements
- 11-15-34
- Safety Statements
- 16-26-36/37/39-45-27
- RIDADR
- UN 2924 3/PG 2
- WGK Germany
- 3
- F
- 10-21
- TSCA
- Yes
- HazardClass
- 3
- PackingGroup
- II
- HS Code
- 29319090
Use
Bis(dimethylamino)dimethylsilane is used in the chemical vapor deposition of silicon nitride films, and also the atomic layer deposition of SiNxCy dielectric sealing layers using plasma-enhanced atomic layer deposition (PE-ALD). It is also used as a reagent for silylation.
1 India supplier list of "Bis(dimethylamino)dimethylsilane"
- Product Name:Bis(dimethylamino)dimethylsilane
- Products Intro:Brand:sigma aldrich | Product Number:14755 | Purity:forGCderivatization,LiChropur?,≥95.0%(GC)
- Company Type: Trader
- Country/Region: INDIA
- Product Name:Bis(dimethylamino)dimethylsilane
- Products Intro:Purity: 99% | Package: 1KG;1USD
- Company Type: Trader
- Country/Region: CHINA
$1.00/ 1KG
- Product Name:Bis(dimethylamino)dimethylsilane
- Products Intro:Purity: Min98% HPLC | Package: 1KG;1USD
- Company Type: Trader
- Country/Region: CHINA
$1.00/ 1KG