TETRAKIS(DIETHYLAMINO)ZIRCONIUM
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- ₹0
- Product name: TETRAKIS(DIETHYLAMINO)ZIRCONIUM
- CAS: 13801-49-5
- MF: C4H11NZr
- MW: 164.36
- EINECS:
- MDL Number:MFCD00015649
- Synonyms:Tetrakis(diethylaMino)zirconiuM(IV), 99%;Zirconium, tetrakis(diethylamino)-;TETRAKIS(DIETHYLAMIDO)ZIRCONIUM(IV), ELECTRONIC GRADE, 99.99+%;Tetrakis(diethylamino)zirkonium;Tetrakis(diethylamino)zirconium,99%;tetrakis(diethylamido)zirconium(iv);TETRAKIS(DIETHYLAMINO)ZIRCONIUM;ZIRCONIUM DIETHYLAMIDE
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Properties
Boiling point :128 °C/0.05 mmHg (lit.)
Density :1.026 g/mL at 25 °C (lit.)
refractive index :n20/D 1.51(lit.)
Flash point :54 °F
storage temp. :2-8°C
form :liquid
color :yellow
Sensitive :Moisture Sensitive
Density :1.026 g/mL at 25 °C (lit.)
refractive index :n
Flash point :54 °F
storage temp. :2-8°C
form :liquid
color :yellow
Sensitive :Moisture Sensitive
Safety Information
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Description
Tetrakis (diethylamino) zirconium is a useful precusor compound in the deposition of thin film ferroelectric materials by CVD. It is also useful in the production of olefin polymers1,2. As a precusor, it is also useful in the deposition of ZrN films using remote plasma-enhanced atomic layer deposition method3.Related product price
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