TRIS(DIMETHYLAMINO)SILANE
- ₹14797.78 - ₹68803.7
- Product name: TRIS(DIMETHYLAMINO)SILANE
- CAS: 15112-89-7
- MF: C6H19N3Si
- MW: 161.32
- EINECS:239-165-0
- MDL Number:MFCD00048006
- Synonyms:TRIS(DIMETHYLAMINO)SILANE;n,n,n’,n’,n’’,n’’-hexamethyl-silanetriamin ;n,n,n’,n’,n’’,n’’-hexamethylsilanetriamine ;N,N,N’,N’,N’’,N’’-hexamethyl-Silanetriamine ;TRIS(DIMETHYLAMINO)SILANE 99+%;N,N',N''-(Silanetriyl)tris(dimethylamine);N,N',N''-Silanetriyltris(dimethylamine);TRIS(DIMETHYLAMINO)SILANE, 99.9+%
2 prices
Selected condition:
Brand
- Sigma-Aldrich(India)
Package
- 25G
- ManufacturerSigma-Aldrich(India)
- Product number570133
- Product descriptionTris(dimethylamino)silane electronic grade, 99.999%
- Packaging25G
- Price₹14797.78
- Updated2022-06-14
- Buy
- ManufacturerSigma-Aldrich(India)
- Product number759562
- Product descriptionTris(dimethylamino)silane packaged for use in deposition systems
- Packaging25G
- Price₹68803.7
- Updated2022-06-14
- Buy
Manufacturer | Product number | Product description | Packaging | Price | Updated | Buy |
---|---|---|---|---|---|---|
Sigma-Aldrich(India) | 570133 | Tris(dimethylamino)silane electronic grade, 99.999% | 25G | ₹14797.78 | 2022-06-14 | Buy |
Sigma-Aldrich(India) | 759562 | Tris(dimethylamino)silane packaged for use in deposition systems | 25G | ₹68803.7 | 2022-06-14 | Buy |
Properties
Melting point :<0°C
Boiling point :145 °C
Density :0,838 g/cm3
refractive index :1.4247
Flash point :25°C
pka :10.93±0.70(Predicted)
form :liquid
color :colorless to light yellow
Specific Gravity :0.84
Sensitive :air sensitive, moisture sensitive
Hydrolytic Sensitivity :8: reacts rapidly with moisture, water, protic solvents
EPA Substance Registry System :N,N,N',N',N'',N''-Hexamethylsilanetriamine (15112-89-7)
Boiling point :145 °C
Density :0,838 g/cm3
refractive index :1.4247
Flash point :25°C
pka :10.93±0.70(Predicted)
form :liquid
color :colorless to light yellow
Specific Gravity :0.84
Sensitive :air sensitive, moisture sensitive
Hydrolytic Sensitivity :8: reacts rapidly with moisture, water, protic solvents
EPA Substance Registry System :N,N,N',N',N'',N''-Hexamethylsilanetriamine (15112-89-7)
Safety Information
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Description
Tris(dimethylamino)silane (TDMAS) is used as an organosilicon source for the deposition of Si oxynitride; carbonitride; nitride and oxide thin films. It is also used to form multicomponent silicon containing thin films. The depositions can be carried out at low substrate temperatures (<150). The melting point and vapor pressure of TDMAS is in a suitable working range; thus making it a very good vapor deposition precursor.More related product prices
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